CAS PUR-Therm Gas Delivery Heater

Description

Features
Clean and pure flow tube
Particle Test: Meets Semi F-70 “Ultra-High Purity” spec
Roughness (Ra): Meets Semi F-19 “Ultra-High Purity” spec
Average Ra: 2.53 μin (0.064262 μm)
Maximum Ra: 3.19 μin (0.081026 μm)
Bend Radius: Complies with Semi E49 Guidelines for Inert and Reactive Gases (5 x Radius)
Passivated to ASTM-967 specs
Powerful and accurate heat
Max Operating Temperature to 300°C (572°F)
Standard Power: 208 Volt single phase, 400 Watts
Replaceable Heating Element
Dual Sensor Thermocouple: for accurate control of operating temps and secure over-temp protection
Easily integrated
Industry-Standard Gasline Flow-Tube Size: 1/4″ (6.3 mm) OD, .035 Wall (.89 mm)
Industry-Standard VCR Fittings (certified Ultra-High Purity) on Tube Inlet & Outlet
Body Dimensions: 3.50” (89 mm) x 3.75” (95 mm)